| Specifications |
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| Kinematics & Feedback information
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| Active Axes | | X,Y
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| Travel range | | 20 x 20 mm
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| Encoder Type | | Optical
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| Encoder Model | | Len1
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| Encoder Resolution | | 25 nm
(integrated interpolator)
<1nm
(interpolated by driver)
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| Encoder Interface | | Differential RS422
or Analog Sin/Cos
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| Internal Multiplier | | YES
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| 1) Multiplication factor | | up to x200
(if integrated interpolator)
up to x65536
(if interpolated by driver)
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| Encoder Grating Period | | 20 µm
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| Reference Mark (Index) | | YES (In center of travel)
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| 2) Absolute Accuracy | |
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| before calibration | | ±2.50 µm
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| after calibration | | ±0.15 µm
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| Uni-Directional Repeatability | | ±0.025 µm
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| 2) Bi-Directional Repeatability
(peak to peak) | |
±0.1 µm
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| 2) Bi-Directional Repeatability (RMS) | | ±0.075 µm
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| 3) Pitch, µrad / arcsec | | ±25 / ±5
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| 3) Yaw, µrad / arcsec | | ±13 / ±3
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| Roll, µrad / arcsec | | ±25.00/ ±5.00
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| 4) Maximum Velocity (load 4kg) | | >500 mm/s
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| 5) Maximum Acceleration (load 4kg) | | >45000 mm/s2
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| Limits Switches Type (Safety) | | Optical (Optrons)
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| Limit Switch Polarity (Safety) | | Pushed is closed
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| Limit Switch Voltage | | 5…24 V
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| Load, Guiding & Transmission Information
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| Design Type | | Linear Motor Stage;
Planar Design
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| Linear Motor Model | | LM9
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| Linear Motor Design Type | | Ironless BLDC motor
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| Maximum Bus Voltage | | >80 VDC
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| 6) Load Capacity (Centrally Placed) | | 15 kg
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| 7) Moving Mass X | | 1.10 kg
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| 7) Moving Mass Y | | 0.45 kg
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| Guiding System | | Linear rails with carriages
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| Material And Environment Conditions
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| Housing Material | | Aluminum Alloy
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| Housing Coating (Finish) | | Black Anodizing
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| Environment pressure | | Normal Atmosphere
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| Operating Temperature | | 20±2, °C
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| Control, Communication & Cabling
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| 8) Recommended controllers | | ACS Products Line
or
8SMC5-USB series
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| 8) Recommended drivers | | ACS Product Line
or
8SMC5-USB series
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| 9) Recommended power supply | | 1phase / 3 phase
source
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| 12) Recommended communication interface | | EtherCAT / RS232 /
USB / TCP-IP
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| Cable Length | | 2 m
(other by request)
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| 10) Differential Outputs | | Optionally available
by request
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| Additional Details
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| Dimensions of Moving Platform | | 133 x 142 mm
(W x L)
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| Stage Dimensions | | 180 x 170 x 51 mm
(W x L x H)
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| Measurement System | | Metric/Imperial
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| 11) Orthogonality, µrad / arcsec | | 24 / 5
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| 13)Protection Level | | Basic
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| RoHS | | Compliant
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| Weight | | 1.8 kg |
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